Compact high-voltage vacuum feedthrough
Sensors, Devices and Components
The compact feedthrough is based on a vacuum-tight plastic to metal connection (see fig.) without any ceramic parts. The high dielectric strength of the plastic material allows very small dimensions (e.g. 16 mm diameter of the plastic for voltages of 100 kV). The feedthrough can be combined with a high-voltage cable, such that no electrical connections are required on the air side, saving additional space. The material cost is moderate.
- Very compact dimensions – 100 kV feedthrough fits e.g. on a 16 CF flange. Total length of feedthrough approximately 300 mm.
- Leak-rate compatible with ultrahigh vacuum applications. Outgassing rates allow vacuum with pressures down to 10-9 mbar.
- Moderate material cost.
- Connector-free on air-side (if desired).
- Ref.-No.: 0302-4988-WT (288.0 KiB)
PD Dr. Wolfgang Tröger
Senior Patent- & License Manager
Phone: +49 89 / 29 09 19-27