High resolution full material Fresnel Zone Plate array and process for its fabrication
Imaging and Microscopy
Sensors, Devices and Components
Ref.-No.: 0104-5259-GÖ-IT
Background

X-ray microscopy has been shown to be an important imaging technology. The resolution of a microscope is limited by the wavelength of the used radiation. In comparison to visible light, X-rays provide the advantage of a shorter wavelength, potentially allowing higher resolutions. However, refraction or reflection of X-rays by conventional lenses is very limited. Thus, the diffractive Fresnel zone plates have been established as the most popular and successful devices for focusing X-rays, especially in the soft X-ray energies. A (full material) Fresnel Zone Plate is a diffractive lens, composed of multilayers of at least two materials to act as the zones of the FZP.
Technology

We fabricate our multilayer Fresnel zone plates (ML‐FZPs) by depositing alternating layers over focused ion beam (FIB) milled micro pillars or over glass fibers by using atomic layer deposition (ALD) technique. We then slice the deposited micro pillars by using the FIB again. This method allows to fabricate FZPs having outermost zone widths as small as 5 nm with extremely high aspect ratios compared to the FZPs fabricated by lithography techniques.
The micro pillar arrays can be fabricated with the desired tapering angle via the Plasma FIB, and allows ML-FZPs to be fabricated with zones tilted to the Bragg angle, paving the way for high efficient focusing to sub 10nm resolution.
Patent Information
EP 3 282 294 B1 valid in DE, FR, GB
Granted in China: ZL 2017 8 0049606
Granted in Japan: Patent Nr. 6758480
Advantages

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- Ref.-No.: 0104-5259-GÖ-IT (1.0 MiB)
Contact
Gökçe Özyurt
Patent- & License Manager
Electronics Engineer (M.Sc. Econ.)
Phone: +49 89 / 29 09 19-18
Email:
oezyurt@max-planck-innovation.de